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C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4) StdPbc-0519 SEMI G94 — Specification for

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Description

SEMI G94 — Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer

The purpose of this Document is to provide specification and guide for boron trichloride (BCl3) that are used in the semiconductor industry

It oxidizes readily and rapidly to release hydrogen chloride

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5 µ or less (0

C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4) StdPbc-0519 SEMI G94 — Specification forThis Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in October 2011; originally published in 1997; previously published September 2006. NOTICE: This Document was balloted and approved for withdrawal in 2011. Silane is a pyrophoric, flammable colorless gas.

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