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and a thickness of 700 µm
This standard will specify measurement method and measurement points
they are expected to be required for smaller feature sizes to meet CMP requirements
Terminology for Through Silicon Via Metrology
The following list of included components is not exhaustive:
F02300 - SEMI F23 - Specification for Particle Concentration of Grade 10/0.2 Hydrogen StdTpc-Device Tracking and a thickness of 700This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 1, 2018. Available at www. semiviews. org and www. semi. org in May 2018; originally published June 1997; previously published July 2012. The purpose of this Document is to set a maximum permissible particle concentration for 10 0. 2 grade hydrogen and to describe a
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