MF072800 - SEMI MF728 - Practice for Preparing an Optical Microscope for Dimensional Measurements Revision:SEMI MF728-81 (Reapproved 2003) - Superseded SEMI C1 — Guide for

SEMI C1 — Guide for the Analysis of Liquid Chemicals

SEMI M1-0997 (technical revision)

SEMI MF928-0317 (Reapproved 0622)

This Test Method may be used to compare the oxygen reduction of two or more groups of silicon wafers

SEMI F49-0200 (Reapproved 1021)

MF072800 - SEMI MF728 - Practice for Preparing an Optical Microscope for Dimensional Measurements Revision:SEMI MF728-81 (Reapproved 2003) - Superseded SEMI C1 — Guide forDimensional measurements made with an optical microscope are made on the optical image of the specimen and not directly on the specimen itself. The method of illuminating the specimen affects the image content, including the appearance of edges which are used in defining the size of the specimen. This Practice includes adjusting the microscope for Kohler illumination, which provides uniform illumination of the specimen, reduces stray light, and