M07100 - SEMI M71 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI StdPbc-1113 after which raw silicon wafers

after which raw silicon wafers are transferred to another carrier at device makers

Forming an industry-consensus standard will minimize contamination

SEMI D46-0525 (technical revision)

specifically for identification of flatted and notched silicon wafers

using a differential mobility analyzer (DMA)

M07100 - SEMI M71 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI StdPbc-1113 after which raw silicon wafers1 Purpose 1. 1 This Specification defines thin layer silicon on insulator (SOI) wafer requirements for CMOS large scale integrated circuit (LSI) devices. In the case of 200 and 300 mm wafers this Specification is targeted for nodes from 130 to 14 nm. In the case of 150 mm wafers, older LSI generations are included as well. By defining parameters, inspection procedures and acceptance criteria, both suppliers and customers may uniformly define product