P03100 - SEMI P31 - Practice for Catalog Publication for Chemical Amplified (CA) Photoresist Parameter StdTpc-Chemical & Gas Testing The order of the data

The order of the data items may be restricted by an application document

000 times that of the thin film

Therefore methods are required that allow a fast in-line characterization and sorting of wafers

SEMI E99-0200 (first published)

本仕様はセンサ／アクチュエータネットワークのためのSEMIスタンダードを実装するために規定された一連のスタンダードの一つである。本仕様の具体的な目的は，半導体装置センサ／アクチュエータ通信ネットワーク 上にあるエンドポイントデバイス（EPD）すべてに共通したデバイスオブジェクトで構成される，ネットワークに左右されないアプリケーションモデルを記述することである。

P03100 - SEMI P31 - Practice for Catalog Publication for Chemical Amplified (CA) Photoresist Parameter StdTpc-Chemical & Gas Testing The order of the dataThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2011. Available at www. semiviews. org and www. semi. org in June 2011; originally published September 1997; previously published March 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not