T01800 - SEMI T18 - Specification of Parts and Components Traceability StdPbc-0922 or mapping array

or mapping array

SEMI F45-0307 (Reapproved 0818)

they are not those described in this Test Method

The surface of the specimen opposite the surface to be investigated may be damaged deliberately or otherwise treated for gettering purposes or chemically etched to remove damage

1-0703 (Reapproved 0623) — Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM)

T01800 - SEMI T18 - Specification of Parts and Components Traceability StdPbc-0922 or mapping arrayThe purpose of this Document is to provide standard means to collect and manage data to estimate lifetime or remaining time before such maintenance as calibration, cleaning and replacement more accurately. The final goal of the Standard is to realize the traceability of semiconductor, flat panel display (FPD), or MEMS devices with tracing parts and or components of their manufacturing equipment, including jigs and some consumable materials. This