S02400 - SEMI S24 - Safety Guideline for Multi-Employer Work Areas StdPbc-0219 1-0312 (Reapproved 0921)

1-0312 (Reapproved 0921)

7-0304 (technical revision)

SEMI T21-0212 (first published)

SEMI F81-0611 (technical revision)

本スタンダードは，global Liquid Chemical Distribution Systems Committeeで技術的に承認されている。現版は2001年8月3日，Japanese Regional Standards Committeeにて発行が承認された。2001年9月にwww

S02400 - SEMI S24 - Safety Guideline for Multi-Employer Work Areas StdPbc-0219 1-0312 (Reapproved 0921)This Safety Guideline was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 1, 2011. Available at www. semiviews. org and www. semi. org in August 2011; originally published 1995; previously published March 2006. NOTICE: This Document was reapproved with minor editorial changes. NOTICE: This Standard or Safety Guideline