E18600 - SEMI E186 - Specification for Location and Dimensions for Power Connectors and Ethercat Ports in Mass Flow Controllers and Mass Flow Meters Revision:SEMI E186-1121 - Current 4-0211 (technical revision)

4-0211 (technical revision)

1-0301 (technical revision)

This provides an opportunity to automatically retain information at the equipment itself

SEMI C18-0714 (Reapproved 0620)

この安全ガイドラインは，FLDの上流と下流の圧力比（上流圧/下流圧）が臨界圧力比以上であることに起因する臨界流量において作動するFLDを取り扱うものである。

E18600 - SEMI E186 - Specification for Location and Dimensions for Power Connectors and Ethercat Ports in Mass Flow Controllers and Mass Flow Meters Revision:SEMI E186-1121 - Current 4-0211 (technical revision)This Standard establishes the location and physical dimensions of mass flow controllers (MFCs) and mass flow meters (MFMs) using EtherCAT communication protocol. This Standard describes location and physical dimension of EtherCAT power and communication connectors used in MFCs MFMs. This Standard applies to mass flow controllers and mass flow meters used in both conventional and surface mount gas delivery systems. Referenced SEMI Standards (purchase