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1996년 12월에 최초 간행되었으며 2010년 5월에 출판되었다
SEMI MF26-0305 (Reapproved 0211)
Boron trichloride is a colorless gas at room temperature and atmospheric pressure which fumes in the presence of moist air
SEMI G29 — Test Method for Trace Contaminants in Molding Compounds
SEMI E140-0618 (technical revision)
S01900 - SEMI S19 - 半導體製造設備之安裝、保養及維修人員訓練之安全基準 Revision:SEMI S19-1102 - Superseded 1996년 12월에 최초 간행되었으며 2010년NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. 200282920029www. semi. org200211 EHS EHS EHS Referenced SEMI Standards None.
