S00600 - SEMI S6 - Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment Revision:SEMI S6-0707E - Superseded These parameters provide meaningful information

These parameters provide meaningful information about the quality of the wafer thinning process (if used)

and optical characteristics of FPD polarizing films

(1 atoms/cm3 × 1020 atoms/cm3) for boron

Filters/purifiers

SEMI M38-1104 (complete rewrite)

S00600 - SEMI S6 - Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment Revision:SEMI S6-0707E - Superseded These parameters provide meaningful informationThis Standard was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017 and February 1, 2018. Available at www. semiviews. org and www. semi. org in June 2018; originally published in 1993; previously published June 2009. NOTICE: Conformance to the should provisions of this Safety Guideline is necessary to