E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps StdTpc-Equipment Models 41 — Standard for Oxygen

41 — Standard for Oxygen (O2)

or vacuum) utilizing a technique such as detecting light from a sample region of the environment’s space

originally published February 2008

IMSは，表面の有機汚染を測定する，容易で，広汎に使用可能で，ぶれが少なくしかも感度の高い方法であることから，この汚染の測定法として選ばれている。

目的（第1節）

E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps StdTpc-Equipment Models 41 — Standard for OxygenNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the physical and electrical interfaces for turbomolecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this