T01600 - SEMI T16 - 極紫外線マスク自動識別用データマトリクス記号法適用の仕様 Revision:SEMI T16-0706 - Superseded such as wafer carriers and

such as wafer carriers and wands

テープフレームカセットのメカニカルインタフェースのみが規定されている。すなわち，材料の種類や清浄性については定義しない。

and site irrigation

The performance of the dimming technology affects the image quality of the display

XML is also used to structure information needed to route and deliver messages between applications

T01600 - SEMI T16 - 極紫外線マスク自動識別用データマトリクス記号法適用の仕様 Revision:SEMI T16-0706 - Superseded such as wafer carriers andNotice: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI global Traceability Committee2006516global Audits and Reviews Subcommittee20066www. semi. org200511 EUV SEMI P37SEMI P386 6 Referenced SEMI Standards SEMI P37 Specification for Extreme Ultraviolet Lithography Mask Substrates SEMI P38