M00100 - SEMI M1 - Specification for Polished Single Crystal Silicon Wafers Revision:SEMI M1-0416 - Superseded Subordinate Standard (included):

Subordinate Standard (included):

SEMI MF1617 — Test Method for Measuring Surface Sodium

SEMI D22-0818 (Reapproved 0924)

SEMI MF1230-02 (first SEMI publication)

A measurement gauge is defined by a specific realization of systems and subsystems required to make measurements

M00100 - SEMI M1 - Specification for Polished Single Crystal Silicon Wafers Revision:SEMI M1-0416 - Superseded Subordinate Standard (included):1 Purpose 1. 1 Single crystal silicon wafers are utilized for essentially all integrated circuits and many other semiconductor devices. To permit common processing equipment to be used in multiple device fabrication lines, it is essential for the wafer dimensions to be standardized. 1. 2 In addition, as technology advances to smaller and smaller dimensions for the elements of high density integrated circuits, it has become of interest to standardize