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SEMI E134-0624 (technical revision)
org in June 2013
which have discriminated between XLSs and LLSs for several years
This Practice covers procedures for defining a wafer coordinate system for locating uniquely any point on a wafer surface using the wafer center as the origin and either Cartesian (x-y) or polar (r-θ) coordinates
本スタンダードは，新たな装置プロセスのタイプや本スタンダードの既存の装置プロセスのタイプでEQIPが発見される度に，更新可能な様に設計されている。
G07100 - SEMI G71 - パッケージング材料の中間容器のバーコードマーキングの仕様 Revision:SEMI G71-0996 (Reapproved 0811) - Superseded SEMI E134-0624 (technical revision)global Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org1996200411 : Referenced SEMI Standards None.
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