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SEMI F63-1016 (technical revision)
check valves
some of which quantify more specific aspects
where the metal detection limits are 108 to 1010 atoms/cm2
この文書は，その他の
HB01000 - SEMI HB10 - Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB-LED Wafers Revision:SEMI HB10-1018 - Inactive SEMI F63-1016 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Sapphire has become the most popular substrate material in the HB LED industry. This Standard identifies and defines the key parameters of sapphire intended for use in manufacturing HB LED wafers. The properties of sapphire
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