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This Test Method covers calculation of the near edge geometry metrics PSFQR and PSFQD
SEMI MF1366-0308 (Reapproved 0413)
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1 — Specification for Product Time Measurement in GEM 300 Production Equipment
G08100 - SEMI G81 - Specification for Map Data Items StdPbc-0815 This Test Method covers calculationThis Document describes the data items that relate to electronic substrate mapping. This Document applies only to substrate map data items. This Document does not address the transmission, file naming conventions, storage or archiving of substrate maps. The Specification of which data items are optional and which are required is not specified in this Document. The size of each data item described in this Document is maximum size. The actual size may
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