M02100 - SEMI M21 - カーテシアン（デカルト）アレイにおける方形エレメントへの割当アドレスのガイド StdPbc-0723 and a thickness of 700

and a thickness of 700 µm

This Standard was technically approved by the Gases Global Technical Committee

SEMI F5 — Guide for Gaseous Effluent Handling

本基準提供設計考量事項，以期盡可能減少SME或其零組件在壽命終了處理階段對環境的影響。

SEMI S26-0308 (first published)

M02100 - SEMI M21 - カーテシアン（デカルト）アレイにおける方形エレメントへの割当アドレスのガイド StdPbc-0723 and a thickness of 700global Silicon Wafer Committee2010827 global Audits & Reviews Subcommittee201010www. semi. org199220043 Referenced SEMI Standards SEMI M1 Specifications for Polished Single Crystal Silicon Wafers SEMI M17 Guide for a Universal Wafer Grid SEMI M20 Practice for Establishing a Wafer Coordinate System SEMI M59 Terminology of Silicon Technology