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SEMI MF1617-0304 (technical revision)
a procedure is described for qualifying certain moisture analyzers considered suitable for use in qualifying moisture standards
is outlined as part of the test method and alternative
and Services
orgで，そして2007年11月にCD-ROMで入手可能となる。初版は1999年2月発行，前版は2005年11月に発行された。
MF118800 - SEMI MF1188 - Test Method for Interstitial Oxygen Content of Silicon by Infrared Absorption With Short Baseline StdPbc-1113 SEMI MF1617-0304 (technical revision)This Test Method covers the determination of the interstitial oxygen content of single crystal silicon by measurement of an infrared absorption band at room temperature, using a short baseline drawn between 1040 cm1 and 1160 cm1 to reduce the uncertainties due to perturbations in the IR absorption at the end point regions of longer baselines that arise from effects other than absorption by interstitial oxygen. Use of the short baseline results in
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