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G09100 - SEMI G91 - Standard Test Data Format (STDF) Memory Fail Datalog Revision:SEMI G91-0513 - Inactive 本テスト方法は,半導体プロセスに使用されるすべてのタイプの表面実装および一般的ガス配分システムに適用することができる。

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Description

本テスト方法は,半導体プロセスに使用されるすべてのタイプの表面実装および一般的ガス配分システムに適用することができる。

This Specification defines the properties of silicon epitaxial wafers with buried layers that relate to the characteristics of photolithography

wafer size conversion

The testing method proposed in this standard includes dynamic CBU and static CBU

- Disk Compression can be applied to all three types of encapsulation materials

G09100 - SEMI G91 - Standard Test Data Format (STDF) Memory Fail Datalog Revision:SEMI G91-0513 - Inactive 本テスト方法は,半導体プロセスに使用されるすべてのタイプの表面実装および一般的ガス配分システムに適用することができる。NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Standard is to provide a common format for memory fail datalog specification along with necessary synchronization information enabling an efficient dataflow for volume diagnostics applications for

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