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SEMI C36-0705 (technical revision)
예외사항(exception) 및 트레이스 데이터(Trace Data)를 취득하는 수단을 제공한다
The Standard is not intended to identify all quality parameters
Parts of the input/exit ports of equipment and minienvironments
5 m to 5 m
C01900 - SEMI C19 - Specification for Acetone StdTpc-Automation Technology SEMI C36-0705 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for acetone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically
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