P04500 - SEMI P45 - Specification for Job Deck Data Format for Mask Tools Revision:SEMI P45-0421 - Current These provide automatic handling and

These provide automatic handling and take into consideration manual handling

·    緊急操作

This Document describes the procedures for testing the leak integrity

注意：SEMI E98は，SEMI E98

SEMI P5 — Specification for Pellicles

P04500 - SEMI P45 - Specification for Job Deck Data Format for Mask Tools Revision:SEMI P45-0421 - Current These provide automatic handling andThis Document defines the common job deck data format specifications for mask tools, namely MALY. MALY specification applies to the input data format for mask tools. Referenced SEMI Standards (purchase separately) SEMI P39 Specification for OASIS Open Artwork System Interchange Standard SEMI P44 Specification for Open Artwork System Interchange Standard (OASIS) Specific to Mask Tools Revision History SEMI P45 0421 (technical revision) SEMI P45 1218