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C08500 - SEMI C85 - Guide for Methyl Isobutyl Carbinol (MIBC) StdPbc-1119 22 — Standard for Oxygen

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Description

22 — Standard for Oxygen (O2)

The purpose of this Document is to standardize requirements for tetraethylorthosilicate used in the semiconductor industry and testing procedures to support those standards

SEMI C88-0815 (first published)

本方法は,ここに述べられている条件下で作成された試験データに基づき,融着接合部の特性を記述するのに使用することができる。

and strength of pellicle films used for masks

C08500 - SEMI C85 - Guide for Methyl Isobutyl Carbinol (MIBC) StdPbc-1119 22 — Standard for OxygenThe purpose of this Document is to provide a guide for methyl isobutyl carbinol (MIBC) for which a need has been identified. The scope of this Document covers MIBC which is used in the semiconductor industry. Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals

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