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SEMI M31 — Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers
except on the transparent display and HDR display
previously published March 2010
SEMI E133-0705 (technical revision)
SEMI E142-0224 (technical revision)
E12100 - SEMI E121 - Guide for Style and Usage of XML for Semiconductor Manufacturing Applications Revision:SEMI E121-0304 - Superseded SEMI M31 — Mechanical SpecificationThe inclusion of eXtensible Markup Language (XML) notation within current SEMI Standards reflects the industrys growing interest in XML technology. This Guide is the first step to prepare for XML protocols in SEMI Standards and to establish consistency in XML style and usage. Recommendations given in this Document are intended for the definition and conformance of XML based standards. This Document also attempts to highlight those areas where
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