E12900 - SEMI E129 - Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility StdPbc-1225 a methodology by which semiconductor

a methodology by which semiconductor processing equipment is installed in a cost-effective and timely manner

This Standard describes procedures for measuring the mechanical

SEMI D39-0704 (Reapproved 0710)

The scope of this Standard is limited to the usage and description of AMHS storage equipment (Stockers) as perceived by a SEMI Equipment Communications Standard 2 (SECS-II) host that complies with the GEM model (as specified in § 13)

In microelectronics

E12900 - SEMI E129 - Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility StdPbc-1225 a methodology by which semiconductorThe purpose of this Guide is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing environments. It is a guide for establishing electrostatic compatibility in facilities used for semiconductor manufacturing. Electrostatic compatibility of production equipment is addressed in SEMI E78. Electrostatic surface charge causes a number of undesirable effects in semiconductor manufacturing