E13600 - SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems StdPbc-1020 Some terms are specialized to

Some terms are specialized to IC wafer and device production

Consideration should be given to the use of this or other proposed edge geometry metrics as a process control tool rather than a material exchange specification

• Creep/Lockup

This Practice covers the analysis of the crystallographic perfection in silicon ingots

SEMI MF26-87a (Reapproved 1999) (first SEMI publication)

E13600 - SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems StdPbc-1020 Some terms are specialized toNOTICE: This Standard was completely rewritten in 2021. The purpose of this Test Method is to provide an accurate method for measuring the output power of radio frequency (RF) generators used in RF power delivery systems of semiconductor processing equipment. This Test Method is referred to as a preferred method of RF power measurement for conforming to SEMI E113. This Test Method specifies the testing procedures and test equipment required for