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This Standard clarifies a part of the traceability specific for substrate such as wafer or some other substrates defined in SEMI T13
SEMI E48-95 (first published)
SEMI MF1725 — Practice for Analysis of Crystallographic Perfection of Silicon Ingots
and amorphous silicon chunks using an acid mixture to dissolve the silicon matrix and analytes
Referenced SEMI StandardsNone
S01100 - SEMI S11 - 半導體製造設備微環境之安全及衛生基準 Revision:SEMI S11-1296 (Withdrawn 1106) - Withdrawn - Historical This Standard clarifies a partSEMI S23. 1 These guidelines are intended as a minimum set of performance based environmental, health, and safety considerations for minienvironments used in semiconductor manufacturing. These guidelines are intended to be a supplement to SEMI S2. These guidelines apply to minienvironments used in the manufacturing, metrology, assembly, and testing of semiconductor products. Equipment enclosed by, or used in conjunction with, the minienvironments is
