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The metrics calculated by this Test Method are based on a thickness data array
form a complete interoperability specification for the VPG
Values of the image obtained using this method are reported in Ra
SEMI E87-0301 (technical revision)
1-1020 - Specification for TCP/IP Interface for Production Equipment Smart Connection Interface (PESCI)
PV05500 - SEMI PV55 - Data Definition Specification for a Horizontal Communication Between Equipment for Photovoltaic Fabrication System Revision:SEMI PV55-0415 - Inactive The metrics calculated by thisNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to define a standard description of data, to be exchanged on an interface for horizontal communication between adjacent PV equipment. XML and XML schemas are common and widely used
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