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E12400 - SEMI E124 - Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics Revision:SEMI E124-1107 - Superseded This Guide defines standardized positions

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Description

This Guide defines standardized positions for measuring diameter of circular wafers of silicon and other semiconducting materials especially those processed with edge-follower edge-rounding equipment that contain flats or notches (fiducials) on the periphery

SEMI S14-0309 (technical revision)

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E12400 - SEMI E124 - Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics Revision:SEMI E124-1107 - Superseded This Guide defines standardized positionsNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Guide describes metrics that show how well a factory is operating compared to how well it could be operating (for the given product mix). These metrics can be used for tracking factory performance (in value added

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