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F-GHG 배출의 측정 및 특성 표시
or used in conjunction with
This Guide also suggests use of energy equivalent values in order to facilitate quantification of overall energy consumption related to SME as well as planning of energy efficiency improvement
integration
and 16 nm technology generations
E19200 - SEMI E192 - Guide for Equipment Adoption Criteria for GEM and GEM-related Standards StdPbc-0419 F-GHG 배출의 측정 및 특성1 Purpose 1. 1 This Standard provides general guidance for implementing the SEMI E30 (GEM) Standard. It also provides general guidance for implementing the many standards built using the GEM and SEMI E5 (SECS II) Standards. 2 Scope 2. 1 This Standard applies to any manufacturing equipment that implement the GEM Standard and any of the Standards built on GEM and SECS II technology. 2. 2 This Standard is not limited to any specific industry. The
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